????? ????? ??????? ???? ??????? ???????? ?? ????? ??????? 1

????? ?? ??? ??????? ??????????

????? ??? ??????? ????? ????? ??????? ????? ?????? ??? ???? ??????? ??????? ??????? ????????? ???????? ???? ???????????. ??????? ??? ???????? ???????? ????? ??????? ???????? ???? ????? ???????? ?????? ??????? ???????? ??? ?? ??? ???????? ???????? ???????????? ???????????? ??????? ???????. ?????? ????? ??? ?????? ???????? ??????? ????? ????? ??????? ????? ?????? ?????? ???????? ?????? ????????.

??? ???? ??????? ???????? ?? ?????? ?? ??? ??????? ???????

???? ???? ??????? ???????? ????? ?????? ?? ????? ????? ???????. ??? ?????? ???? ???????? ??????? ???? ???? ????? ?????? ?????? ???????? ????????? ??????. ???? ?? ???? ??????? ??????? ???? ??????? ?? ??????? ???? ???? ??? ???????? ??????? ?? ??? ?????? ????? ?? ???? ?????? ??????? ???.

????? ???? ???????: ???? ?????? ??????

????? ????? ??????? ?????? ?????? ?? ????? ????? ???????. ??? ???? ?????? ?????? ??????? ?? ????? ??????? ????? ?????? ??? ???? ???? ??????? ???????. ?????? ?? ????? ????? ??????? ????? ????? ????? ????? ??? ???????? ???????? ??????? ?????????. ??? ???? ??????? ?? ????? ????? ??? ?????????? ?????????? ????? ????? ??????? ????? ?? ????? ????? ???????????? ????? ????? ????. ???? ????? ??????? ???????? ?????? ????? ????? ??????? ???? ???? ?????? ??? ???????? ????????? ??? ????? ???? ?????? ????????? ??????? ???????? ?????? ???????.

????? ??????? ???????: ?????? ??? ?????? ?????? ????? ???????

??? ????? ??????? ?? ??? ??????? ???? ???? ????? ??? ??? ?????? ?????? ??????? ???????? ?????? ???????? ???????? ????. ????? ????? ??????? ??????? ?????? ?????? ??? ??????? ????? ?????? ??? ?????? ??????. ?????? ??? ??????? ?? ???? ??????? ?? ????? ??????? ??????? ????? ????????? ?? ???? ????? ??????? ?? ????? ??????? ??????. ?? ???? ?????? ??? ??????? ??????? ?????? ??? ??????? ????? ????? ??????? ????? ???? ??????? ???? ????? ??????.

???? ???????? ?????? ????????

???? ??? ??????? ?????? ??????? ????? ??????? ??? ????? ISO 14644-1? ???? ???? ???? ?????? ??????? ?? ???????? ????????. ?????? ?????? ?? ???? ??????? ???????? ?????? ?????? ?? ????? ??? ????????? ?????????. ??? ?? ???? ????? ??????? ?????? ?????? ?????? ????? ????? ??? ??????? ?? ????? ???????? ????? ?????? ??????? ????????? ??? ???? ????? ????? ???????? ???????.

?????? ??????? ?????? ?????? ???? ??? ???????

??? ???????? ??????? ?? ?????? ????????? ??? ????? ????? ????? ?????? ????? ??? ??????? ???? ?????. ??? ??? ???????? ??????? ????? ???????? ????? ????? ??????????? ??? ????????? ????????? ?????????? ????????? ??????? ???? ??????? ???????? (RTDs). ???? ??? ?????????? ?????? ????? ????? ???????? ??? ???? ?????? ??????? ????? ?????? ??? ?????? ??????.

???????? ????? ???????? ??????? ?????? ??? ???????? ?????? ?? ??????? ??? ??????? ???????. ??? ???? ??????? ??????? ?????????? ??????? ??? ???? ???? ????? ?????????? ????????? ??????? ????????? ??????. ???? ??? ?????????? ?????? ????? ???????? ??? ?????? ?? ????? ??????? ??????? ????? ??? ???? ?? ????????.

??????? ????? ????? ??????? ???? ??????? ???????? ????? ?????? ?? ????? ?????? ??? ??????? ??????? ???. ??? ???? ???? ?????? ??????? ????? ??? ??????? ?? ???? ??????? ?????? ????????? ????????? ??????? ?????? ????????. ?????? ???????? ?? ?????? ????????? ?? ????? ????? ??????? ??? ???????? ??? ???? ???????? ?????? ?????? ???? ?? ??????? ?????? ?? ?????? ???????.

????? ???? ???? ????????? ????? ????? ??????? ???????.

??? ??? ?????? ??? ?? ???? ????? ?????????? ??? ????? ?? ??????? ???.

???? ?? ????? ????????? ?????? ???????? ??????? ?????? ??????? ??????? ?????? ??? ????? ???? ?? ?????? ????? ????? ????????? ?????? ????????? ???????? ?????? ????? ????? ????? ?????? ???????? ??????? ??? ??? ?? ????? ????? ????????? ?????? ????????? ???????? ?????? ????? ???????? ???????.

?? ????? ???? ????????? ??????? ?????? ??????? ????? ????? ???? ???????? ??????? ???? ?????? ??????? ??? ??? ????? ??????? ?????? ??????? ????????? ??? ????????.